This guide was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1978; previously published July 2004.

Liquid Chemicals are used extensively during the production of semiconductor devices; their purity has been shown to affect the device yield during the manufacturing processes.

Since there is a wide range of semiconductor devices being produced, different levels of purity have been established as standards and guidelines for each liquid chemical.

This guide describes the various analytical procedures for standards verification procedures required to meet a specific liquid chemical specification.

All liquid chemical standards consist of guidelines, specifications and validated analytical procedures. Suitable analytical procedures are defined in each standard for each grade of liquid chemical such that their sensitivity meets the requirements of each of the respective grades of liquid chemicals.

This guide provides an overview of each of the methods used for liquid chemical certification. Each grade of liquid chemicals (1-5) that have been validated analytically using the appropriate procedures described in this guide can be described as "meeting SEMI specifications".

Analytical Procedures - The procedures used to establish a liquid chemical specification can be found in §7. The Analytical Procedures are listed in Table 1.

Safety - Because of the continuing evolution of safety precautions, it is impossible for this publication to provide definite statements related to the safe handling of individual liquid chemicals. The user is referred to product labels, product data sheets, government regulations, and other relevant literature.

Referenced SEMI Standards
None.

Revision History
SEMI C1-0705 (technical revision)
SEMI C1-0704 (technical revision)
SEMI C1-1102 (technical revision)
SEMI C1-1101(technical revision)
SEMI C1-0701 (technical revision)
SEMI C1-0301 (technical revision)
SEMI C1-1000 (technical revision)
SEMI C1-0200 (technical revision)
SEMI C1-1995 (technical revision)
SEMI C1-1994 (technical revision)
SEMI C1-1993 (technical revision)
SEMI C1-1989 (technical revision)
SEMI C1-1978 (first published)

This guide was technically approved by the Global Liquid Chemicals Committee and is the direct responsibility of the North American Liquid Chemicals Committee. Current edition approved by the North American Regional Standards Committee on November 4, 2004. Initially available at www.semi.org January 2005; to be published March 2005. Originally published in 1997; previously published February 1999.

To provide a minimal set of guidelines for reporting the precision and traceability of data supporting a Process Chemicals or Gases SEMI specification. This guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases specification or verification of performance to such a SEMI specification.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents

Revision History
SEMI C16-0299 (Reapproved 0305)
SEMI C16-0299 (technical revision)
SEMI C16-0697 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of acetic acid used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C18-0708 (techincal revision)
SEMI C18-0301 (technical revision)
SEMI C18-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of acetone used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C19-0708 (technical revision)
SEMI C19-0301 (technical revision)
SEMI C19-0699 (first published)

This specification and these guidelines were technically approved by the Global Process Chemicals Committee and are the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www.semi.org September 2001; to be published November 2001. This document replaces SEMI C1.3, C7.18, and C11.2 in their entirety. Originally published in 1978, 1995, and 1994 respectively. Previously published March 2001.

The purpose of this document is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of ammonium fluoride 40% for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of ammonium fluoride 40% used in the semiconductor industry. The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8-1.2 microns.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C20-1101 (technical revision)
SEMI C20-0301 (technical revision)
SEMI C20-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of ammonium hydroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of ammonium hydroxide used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C21-0708 (technical revision)
SEMI C21-0301 (technical revision)
SEMI C21-0600 (technical revision)
SEMI C21-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1994; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to provide guidelines for grades of boron tribromide for which a need has been identified.

The scope of this document lists the proposed impurity limits of boron tribromide used in the semiconductor industry.

Referenced SEMI Standards
None.

Revision History
SEMI C22-0306 (complete rewrite)
SEMI C22-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1981; previously published 2001.

The purpose of this document is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of buffered oxide etchants for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of buffered oxide etchants used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C23-0708 (technical revision)
SEMI C23-0301 (technical revision)
SEMI C23-0699 (first published)

This specification was technically approved by the Global Process Chemicals Committee and is the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February 2001; to be published March 2001. This document replaces SEMI C1.5 in its entirety. Originally published in 1978; previously published June 1999.

The purpose of this document is to standardize requirements for n-butyl acetate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of n-butyl acetate for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of n-butyl acetate used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C24-0301 (technical revision)
SEMI C24-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1978; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for dichloromethane (methylene chloride) used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of dichloromethane for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of dichloromethane used in the semiconductor industry.

The scope of this document is all grades of dichloromethane used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C25-0306 (complete rewrite)
SEMI C25-0699E (editorial revision)
SEMI C25-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1983; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for hexamethyldisilazane used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of hexamethyldisilazane for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of hexamethyldisilazane used in the semiconductor industry.

The scope of this document is all grades of hexamethyldisilazane used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C26-0306 (complete rewrite)
SEMI C26-0600E (editorial revision)
SEMI C26-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published June 2001.

The purpose of this document is to standardize requirements for hydrochloric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of hydrochloric acid for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of hydrochloric acid used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C27-0708 (technical revision)
SEMI C27-0301 (technical revision)
SEMI C27-0600 (technical revision)
SEMI C27-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 16, 2006. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1978; previously published July 2005.

The purpose of this document is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of hydrofluoric acid used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C28-0306 (technical revision)
SEMI C28-0705 (technical revision)
SEMI C28-0704 (technical revision)
SEMI C28-0301 (technical revision)
SEMI C28-0699 (first published)

These specifications and this guideline were technically approved by the Global Process Chemicals Committee and are the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February 2001; to be published March 2001. This document replaces SEMI C7.4, C8.4, and C12.3 in their entirety. Originally published in 1990, 1992, and 1995 respectively; previously published June 1999.

The purpose of this document is to standardize requirements for 4.9% hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of 4.9% hydrofluoric acid for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of 4.9% hydrofluoric acid used in the semiconductor industry.

Referenced SEMI Standards
SEMI C28 —Specifications and Guidelines for Hydrofluoric Acid

Revision History
SEMI C29-0301 (technical revision)
SEMI C29-0699 (first published)

These specifications and guidelines were technically approved by the Global Process Chemicals Committee and are the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www.semi.org September 2001; to be published November 2001. This document replaces SEMI C1.9, C7.5, C8.5, C11.4, and C12.4 in their entirety. Originally published in 1978, 1990, 1992, 1994, and 1995 respectively; previously published March 2001.

The purpose of this document is to standardize requirements for hydrogen peroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of hydrogen peroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of hydrogen peroxide used in the semiconductor industry. The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8-1.2 microns.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C30-1101 (technical revision)
SEMI C30-0301 (technical revision)
SEMI C30-0600 (technical revision)
SEMI C30-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of methanol used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C31-0708 (technical revision)
SEMI C31-0301 (technical revision)
SEMI C31-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published in 1978; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for methyl ethyl ketone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of methyl ethyl ketone for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of methyl ethyl ketone used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C32-0306 (complete rewrite)
SEMI C32-0699 (first published)

These specifications were technically approved by the Global Process Chemicals Committee and are the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February 2001; to be published March 2001. This document replaces SEMI C1.25, C7.16, and C8.11 in their entirety. Originally published in 1986, 1992, and 1998 respectively; previously published June 1999.

The purpose of this document is to standardize requirements for n-methyl 2-pyrrolidone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of n-methyl 2-pyrrolidone for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of n-methyl 2-pyrrolidone used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents

Revision History
SEMI C33-0301 (technical revision)
SEMI C33-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published 1981; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of mixed acid etchants for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of mixed acid etchants used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C2 — Specifications for Etchants

Revision History
SEMI C34-0306 (complete rewrite)
SEMI C34-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1979; previously published March 2001.

The purpose of this document is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of nitric acid for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of nitric acid used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C35-0708 (technical revision)
SEMI C35-0301 (technical revision)
SEMI C35-0200 (technical revision)
SEMI C35-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007. Originally published 1981; previously published November 2006.

The purpose of this document is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of phosphoric acid used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C36-1107 (technical revision)
SEMI C36-1106 (technical revision)
SEMI C36-0705 (technical revision)
SEMI C36-0301 (technical revision)
SEMI C36-0200 (technical revision)
SEMI C36-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published 1981; previously published 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for phosphoric etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of phosphoric etchants for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of phosphoric etchants used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C2 —Specifications for Etchants

Revision History
SEMI C37-0706 (complete rewrite)
SEMI C37-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in January 2005 and on CD-ROM in March 2005. Originally published in 1991; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to provide guidelines for grades of phosphorus oxychloride for which a need has been identified. The scope of this document lists the proposed impurity limits of phosphorus oxychloride used in the semiconductor industry.

Referenced SEMI Standards
None.

Revision History
SEMI C38-0306 (technical revision)
SEMI C38-0699 (first published)

This specification was technically approved by the global Process Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1978; previously published in 1999.

NOTICE: This document was rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of potassium hydroxide pellets for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of potassium hydroxide pellets used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C39-1105 (technical revision)
SEMI C39-0699 (first published)

This specification was technically approved by the global Process Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1999.

NOTICE: This document was completely rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for 45% potassium hydroxide solution used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of potassium hydroxide, 45% solution for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of 45% potassium hydroxide solution used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C40-1105 (technical revision)
SEMI C40-0699 (first published)

This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1978; previously published in 2003.

NOTICE: This document was completely rewritten in 2005.

NOTICE: Paragraphs entitled NOTE are not an official part of this document and are not intended to modify or supercede it.

The purpose of this document is to standardize requirements for 2-proponal used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of 2-proponal for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of 2-proponal used in the semiconductor industry. The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8-1.2 microns.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C41-0705 (technical revision)
SEMI C41-0303 (technical revision)
SEMI C41-1101 (technical revision)
SEMI C41-0301 (technical revision)
SEMI C41-0699 (first published)

This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1978; previously published in 1999.

NOTICE: This document was completely rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for sodium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of sodium hydroxide pellets for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of sodium hydroxide pellets used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C42-0699 (first published)

This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1999.

NOTICE: This document was completely rewritten in its entirety November 2005.

The purpose of this document is to standardize requirements for 50% sodium hydroxide solution used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of 50% sodium hydroxide solution for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of 50% sodium hydroxide solution used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 —Specifications for Reagents

Revision History
SEMI C43-1105 (technical revision)
SEMI C43-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published 1978; previously published March 2001.

The purpose of this document is to standardize requirements for sulfuric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of sulfuric acid for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.

The scope of this document is all grades of sulfuric acid used in the semiconductor industry.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C44-0708 (technical revision)
SEMI C44-0301 (technical revision)
SEMI C44-1000 (technical revision)
SEMI C44-0699 (first published)

This specification and this guideline were technically approved by the Global Process Chemicals Committee and are the direct responsibility of the North American Process Chemicals Committee. Current edition approved by the North American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February 2001; to be published March 2001. This document replaces SEMI C7.13 in its entirety. Originally published in 1991; previously published June 1999.

The purpose of this document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This document also provides guidelines for grades of tetraethylorthosilicate for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this document is all grades of tetraethylorthosilicate used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents

Revision History
SEMI C45-0301 (technical revision)
SEMI C45-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2005 and on CD-ROM in March 2005. Originally published in 1991; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to provide guidelines for grades of 25% tetramethylammonium hydroxide for which a need has been identified.

The scope of this document lists the proposed impurity limits of 25% tetramethylammonium hydroxide used in the semiconductor industry.

Referenced SEMI Standards
None.

Revision History
SEMI C46-0306 (complete rewrite)
SEMI C46-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published 1995; previously published 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to provide guidelines for grades of trans 1,2 dichloroethylene for which a need has been identified.

The scope of this document lists the proposed impurity limits of trans 1,2 dichloroethylene used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C47-0706 (complete rewrite)
SEMI C47-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published in 1988; previously published June 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for 1,1,1-Trichlorethane, Furnace Grade used in the semiconductor industry and testing procedures to support those standards. This document also provides guidelines for grades of 1,1,1-Trichloroethane for which an industry need has been identified. In the case of guidelines, the test methods may not have been developed or may not have been statistically validated at this time.

The scope of this document covers all grades of 1,1,1-Trichloroethane used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C48-0706 (technical revision)
SEMI C48-0699E (editorial revision)
SEMI C48-0699 (first published)

This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1995; previously published June 1999.

NOTICE: This document was completely rewritten in 2005.

The purpose of this document is to standardize requirements for trimethylborate used in the semiconductor industry and testing procedures to support those standards. This document also provides guidelines for grades of trimethylborate for which an industry need has been identified. In the case of guidelines, the test methods may not have been developed or may not have been statistically validated at this time.

The scope of this document covers all grades of trimethylborate used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C49-0699 (first published)

This specification was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005. Originally published in 1995; previously published June 1999.

NOTICE: This document was completely rewritten in 2005.

The purpose of this document is to standardize requirements for trimethylphosphite used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. The scope of this document covers all grades of trimethylphosphite used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C50-1105 (technical revision)
SEMI C50-0699 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published 1978; previously published 1999.

NOTICE: This document was completely rewritten in 2006.

The purpose of this document is to standardize requirements for xylenes used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this document is all grades of xylenes used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o-, m-, and p- isomers and ethyl benzene) 99.0% min and Ethyl benzene 18% max.

Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C51-0706 (complete rewrite)
SEMI C51-0699 (first published)

The purpose of this document is to define terminology and to recommend minimum periods for the shelf lives of specialty gases. It is meant to provide consistency in terminology among gas suppliers and to provide a general guideline for users of these gases. This document applies to the shelf life of properly packaged, filled and analyzed specialty gases as stored or supplied by a specialty gas manufacturer or supplier. In this document, shelf life is viewed from a quality point of view. The document does not address safety aspects associated with the prolonged storage of gases.

Referenced SEMI Standards
None.

Revision History
SEMI C52-0301 (first published)

These specifications were technically approved by the Global Liquid Chemicals Committee and are the direct responsibility of the European Liquid Chemicals Committee. Current edition approved by the European Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004. Originally published November 2001; previously published November 2002.

The purpose of this document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. The scope of this document is all grades of DMSO used in the semiconductor industry.

Referenced SEMI Standards
SEMI C1 — Specifications for Reagents

Revision History
C53-0704 (technical revision)
C53-0302 (technical revision)
C53-1101 (first published)

This standard was technically approved by the global Gases & Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007.

Companies, when dealing with chemical materials supplied in containers, need to control the correct use of these containers and need to verify that the materials they contain are fit for use. To that purpose, the containers need to sufficiently identify the material they contain. To allow automation of these control and verification tasks, the container’s identification data needs to be computer readable.

Various semiconductor producers, as well as their suppliers, have to this purpose defined their own identification standard. This leads to extra complexity on the suppliers’ side, and requires customers each time to negotiate the use of their own standard with each of the suppliers.

This SEMI specification for a Bar-Code Container Identification intends to offer a clear and ready-to-use solution by standardizing the contents and layout of a bar-coded container identification.

Customers not yet using bar-code support in this context, or customers relying on supplier specific bar-coded information, can now expect that all suppliers use the same approach. This simplifies the customer’s software systems and avoids being confronted with supplier specific changes.

Customers that already have agreements with some suppliers on the use of a customer specific label can now expect that all products of all their suppliers and all products of new suppliers show the standard information, avoiding the need for additional one-to-one negotiations and avoiding implementation lead times on the supplier side.

The bar-coded identification allows suppliers and customers to automate control and verification processes in their production and warehousing/storage areas. Typical control and verification tasks that are supported by the specification:
- registration of volumes consumed
- verifying remaining shelf life
- recording incoming/outgoing storage quantities
- verifying correct tool connectivity

The Specification is used to identify primary and secondary packages of packaged commercial materials, and primary packages (e.g., isotainer) of commercial bulk materials.

Small primary packages might not have enough surface space to allow a correct application of bar-codes. In those instances, suppliers are encouraged to look for labeling solutions that would allow the application of this SEMI specification.

Referenced SEMI Standards
None.

Revision History
SEMI C61-0707 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007.

The purpose of this document is to provide guidelines for porogen precursors used in Low K CVD processes for which a need has been identified.

The scope of this document lists the proposed impurity limits for porogen precursors (e.g., Alpha-Terpinine, Limonene, Bicycloheptadiene, Cyclooctane) used in the semiconductor industry.

Referenced SEMI Standards
None.

Revision History
SEMI C62-1107 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007.

The purpose of this document is to provide guidelines for organosilicate precursors used in Low K CVD processes for which a need has been identified.

The scope of this document lists the proposed impurity limits for organosilicate precursors (e.g., Dimethyldimethoxysilane, Octamethylcyclotetrasiloxane, Diethoxymethylsilane, Tetramethylcyclotetrasiloxane) used in the semiconductor industry.

Referenced SEMI Standards
None.

Revision History
SEMI C63-1107 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008.

To provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining Ship to Control (STC) limits.

This guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based.

Referenced Standards:
SEMI C10 — Guide for Determination of Method Detection Limits

Revision History:
SEMI C64-0308 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008.

The purpose of this document is to provide specifications for Trimethylsilane (3MS) used in the semiconductor industry.

This document covers requirements for Trimethylsilane (3MS) used in the semiconductor industry.

Referenced Standards:
None.

Revision History:
SEMI C65-0308 (first published)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008.

The purpose of this document is to provide guidelines for trimethylaluminium used in the semiconductor industry.

The scope of this document covers high purity trimethylaluminium which is used in the semiconductor industry for the deposition of aluminium metal by vapour deposition techniques and aluminium oxide based layers by atomic layer deposition.

Referenced Standards:
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History:
SEMI C66-0308 (first published)