This document defines various areas on the pattern surface of a flat panel display substrate and describes their relationship. It assumes the existence of terminology and a banking convention described in other SEMI Flat Panel Display documents.

Referenced SEMI Standards
SEMI D9 — Terminology for FPD Substrates

Revision History
SEMI D3-91 (Reapproved 0703)
SEMI D3-91 (first published)

This standard covers the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate. These dimensions apply to substrates that are principally used in fabricating AMLCD displays. These dimensions may also be applicable to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D12 — Specification for Edge Condition of Flat Panel Display (FPD) Substrates

Revision History
SEMI D5-94 (Reapproved 0703)
SEMI D5-1994 (technical revision)
SEMI D5-1993 (first published)

This standard was technically approved by the global Flat Panel Display – Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published in 1992; previously published March 2005.

This specification defines standard for substrates used to fabricate liquid crystal display masks.

This specification applies to photomasks that are principally used in fabricating liquid crystal displays. The edge lengths specified range from 202.8 Χ 202.8 mm to 1220 Χ 1400 mm.

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).

Referenced Standards:
SEMI P1 — Specification for Hard Surface Photomask Substrates

Revision History:
SEMI D6-0308 (technical revision)
SEMI D6-0305 (technical revision)
SEMI D6-1101 (technical revision)
SEMI D6-0699 (technical revision)
SEMI D6-1296 (technical revision)
SEMI D6-1993 (first published)

This document defines the method of FPD glass substrate surface roughness measurement by stylus method surface roughness measurement instrument. This specification shall be used by vendors and/or buyers of glass substrates for flat panel display and is effective for all glass substrates used.

Referenced SEMI Standards
None.

Revision History
SEMI D7-94 (Reapproved 0703)
SEMI D7-94 (first published)

This document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates, and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates. These terms and definitions are applicable to both front and back substrates used in FPD fabrication.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for FPD Substrates
SEMI D5 — Standard Size for FPD Substrates
SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method
SEMI D11 — Specification for FPD Glass Substrate Cassettes
SEMI D12 — Specification for Edge Conditions of FPD Substrates
SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

Revision History
SEMI D9-0303 (technical revision)
SEMI D9-1101 (technical revision)
SEMI D9-94 (first published)

This test procedure evaluates quantitatively the durability of flat panel display (FPD) glass substrates using reagents employed in FPD production processes. This standard may be used by vendors and/or buyers of glass substrates for FPD. This standard defines three methods for testing chemical durability of various flat panel display substrates: (Method A) Weight Loss, (Method B) Step Measurement Using Profilometry, and (Method C) Surface Haze. Each method provides a measure of the amount of material that is removed from a substrate during a controlled chemical reaction sequence. This sequence is nominally identical for each method.

Referenced SEMI Standards
SEMI D5 — Standard Size for FPD Display Substrates

Revision History
SEMI D10-0095 (Reapproved 0703)
SEMI D10-0095 (first published)

This document describes cassettes that are used with glass substrates in the fabrication and processing of subassemblies and masks for flat panel displays (FPD). This document applies to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.

Referenced SEMI Standards
SEMI D3 — Quality Area of FPD Substrates
SEMI D5 — Standard Size for FPD Substrates
SEMI D6 — Standard Size and Thickness for Flat Panel Display Mask Substrates
SEMI D9 — Terminology for FPD Substrates
SEMI D21 — Definitions for Flat Panel Display Masks
SEMI E1 — Specification for 3", 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers

Revision History
SEMI D11-95 (Reapproved 0703)
SEMI D11-95 (first published)

This document defines various aspects of the edges of a flat panel display substrate and describes their relationships. It assumes the existence of terminology described in other SEMI flat panel display documents. It applies to substrates whose nominal thickness specification is 1.1 mm. The edges of a flat panel display substrate are important in both the specifications for and uses of the material. They effect the means for producing, handling, storing, and processing substrates. Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates

Revision History
SEMI D12-95 (Reapproved 0703)
SEMI D12-95 (first published)

This standard was technically approved by the global Flat Panel Display – Color Filters & Optical Elements Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published in 1995; previously published November 2001.

These terms and definitions describe various elements and characteristics of FPD color filter (CF) assemblies. They are intended to assist in future CF standardization activity.

Color filters comprise the plate assembly in a colored flat panel display. They consist of a number of material layers such as substrate, color filter layer, black matrix, overcoat layer, and transparent conductive films. Each of these layers has various properties which may need to be specified, produced, controlled, and characterized. This document provides an overview of these layers, with terms and definitions for selected elements, and indicates the appearance of some color filter defects. This document may be useful in developing material specifications, inspection criteria, and test methods.

Referenced Standards:
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D20 Terminology for FPD Mask Defect
SEMI D21 Terminology for FPD Mask Pattern Accuracy
SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History:
SEMI D13-0708 (technical revision)
SEMI D13-1101 (technical revision)
SEMI D13-95 (first published)

This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement methods. This test method is applicable to the documentation of waviness of all types of glass substrates used for flat panel displays.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D9 — Definitions for Flat Panel Display Substrates

Revision History
SEMI D15-1296 (Reapproved 0703)
SEMI D15-1296 (first published)

This specification was technically approved by the Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Stadards Committee July 1998. Published on SEMI OnLine September 1998; print version published September 1998.

This specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment. These standards define mechanical features on or about the process tool port, and in front of or on the tool face. Although these features are intended for specific functions, they do not set design requirements for any particular functionality.

The interface requirements are meant to be universal and to avoid the promotion of any particular form of transport. Therefore, they are useful for the interfacing of continuous direct WIP transports, such as conveyors, or discrete vehicles of foreseeable future design, such as AGVs, to the process tool port. The dimensions incorporated in the standard apply to single panel handling as well as substrate carriers.

Referenced SEMI Standards
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes

Revision History
SEMI D16-0998 (first published)

This standard specifies selected requirements of the cassettes used to ship flat panel display substrates from the substrate finisher to the display maker and between process-added users. This document incorporates pertinent dimensional data from SEMI D18, Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates.

This standard is intended to set levels of specification for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity. This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at common mechanical interfaces.

Referenced SEMI Standards
SEMI D18 — Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates
SEMI E15 — Specification for Tool Load Port

Revision History
SEMI D17-0200 (technical revision)
SEMI D17-0998 (first published)

This document was editorially modified in October 2000 to correct a formatting error. Changes were made to FIgure 5.

This standard specifies the cassettes used to horizontally transport and store glass substrates 0.7 mm-1.1 mm thick (max) in a flat panel display (FPD) manufacturing facility. This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Most of the requirements given in this specification are in the form of algebraic expressions defining maximum or minimum dimensions referenced from the length and width of the intended substrate with very few required surfaces. Only the mechanical interfaces for cassettes are specified; no materials requirements or micro-contamination limits are given. However, this standard has been written so that cassettes of various designs and materials can be manufactured in conformance with it.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D6 — Standard Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI D9 —Definitions for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes
SEMI D21 — Terminology for Flat Panel Display Masks
SEMI E15 — Specification for Tool Load Port

Revision History
SEMI D10-0299E (editorial revision)
SEMI D18-0299 (first published)

This test method was technically approved by the Global Flat Panel Display Committee and is the direct responsibility of the Japanese FPD Color Filter & Optical Elements Committee. Current edition approved by the Japanese Regional Standards Committee on November 24, 2004. Initially available at www.semi.org January 2005; to be published March 2005. Originally published in 1999; previously published in February 1999.

This standard establishes two methods for evaluating the chemical resistance of FPD color filters. One of these methods is qualitative, the other is quantitative. These methods may be used by suppliers and users of color filters for FPD applications, for use in judging quality of production and developing samples. These methods test the chemical resistance of color filters by utilizing chemicals and conditions typically employed in FPD manufacturing. These methods are destructive.

Referenced SEMI Standards
None.

Revision History
SEMI D19-0305 (technical revision)
SEMI D19-0299E (editorial revision)
SEMI D19-0299 (first published)

This standard was technically approved by the global Flat Panel Display - Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published in 1993; previously published October 2000.

This document defines defect terminology for FPD masks. By this standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.

These terms apply to photomasks that are principally used in fabricating flat panel display.

Referenced SEMI Standards
None.

Revision History
SEMI D20-0706 (technical revision)
SEMI D20-1000 (technical revision)
SEMI D20-93E (editorial revision)
SEMI D20-1993 (first published)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published 1992; previously published October 2000.

This document defines terminology for FPD masks. By this standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc are clarified and that standardization as to masks will be promoted.

These terms apply to photomasks that are principally used in fabricating flat panel display.

Referenced SEMI Standards
None.

Revision History
SEMI D21-0706 (technical revision)
SEMI D21-1000 (technical revision)
SEMI D21-0999E (editorial revision)
SEMI D21-0999 (first published)

NOTICE: This document was completely rewritten in 2003.

This standard establishes practices for measuring selected characteristics of FPD color filters. These methods are applicable to manufacturing, quality control, and development operations. This method is to be used by FPD color filter suppliers and users to evaluate quality of products as well as items under development. This method shall be used in general to measure the color characteristics and transmittance of FPD color filter.

Referenced SEMI Standards
SEMI D13 — Terms and Definitions for FPD Color Filter Assemblies

Revision History
SEMI D22-1103 (technical revision)
SEMI D22-0999 (first published)

The purpose of this document is to provide a standard, simple CEO calculation method for evaluating FPD manufacturing equipment. With this document, the following merits can be expected:
Both panel and equipment manufacturers, as well as material manufacturers can work from the same standard with regard to cost.
Panel manufacturers' basis for equipment comparison will become clear, which will, in turn, help in equipment selection.
The document will serve to clarify cost reduction items as well as benchmark cost reduction activities. Direction for improvement for equipment manufacturers will become clear.

By doing a separate analysis, comparison, and evaluation of lines, equipment for different substrate sizes will become simpler.

This standard focuses on each equipment in the FPD production line. It is used to define the calculation method for cost of installing/operating that equipment, to define the calculation method for productivity of that equipment, and to quantify CEO of that equipment. It is necessary to clarify the substrate sizes that can be handled by this equipment. However, this standard does not deal with the equipment process performance. It takes the point of view that each panel manufacturer should evaluate each equipment's process performance, including yield, based on their own process requirements.

Referenced SEMI Standards
None.

Revision History
SEMI D23-0999 (first published)

This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published February 2000.

This standard specifies selected geometrical requirements of glass substrates used to manufacture flat panel displays.

This standard is intended to set levels of specification for glass substrates to insure repeatable manufacture of flat panel displays and uniformity of substrates from all vendors. This standard will also insure inter-changeability at all mechanical interfaces within process tools as well as with Transportation and Automation Cassettes.

Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D6 — Specification for Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method
SEMI D9 — Definitions for Flat Panel Display Substrates
SEMI D12 — Specification for Edge Condition of Flat Panel Display (FPD) Substrates
SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method

Revision History
SEMI D24-0200 (Reapproved 0706)
SEMI D24-0200 (first published)

This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published June 2000.

E This standard was editorial modified in October 2003 to correct general editorial errors. Changes were made to §§ 3.2.2, 6.2.8.1, 6.2.9.1, and A3-1 (figure).

This document provides the packing and shipping specifications and/or guides for FPD glass substrates, which are called fourth generation substrates (800 950 0.7 mm or 800 950 1.1 mm).

The objective of this document is to provide cost-effective packing and shipping in terms of packing materials, storage, and shipping, while making sure that packing meets the quality and automation requirements.

This document defines a specification for a full box type shipping case (see Figure 2) to be used for packing and shipping of 4th generation FPD glass substrates from the manufacturer of the glass substrate to the user.

The application of this packing specification is limited to the following four FPD glass substrates:
- Bare glass substrates which can be used as array substrates, and do not have film deposition.
- Bare glass substrates which can be used as facing substrates and color filter substrates, and do not have film deposition. Array substrates which do have film deposition.
- Facing substrates and color filter substrates which do have film deposition.

Referenced SEMI Standards
SEMI D9 — Terminology for FPD Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

Revision History
SEMI D25-0600E (Reapproved 0706)
SEMI D25-0600E (editorial revision)
SEMI D25-0600 (first published)

This specification establishes a set of standards to assist in specifying and ordering large area masks for the Flat Panel Display industry. A major objective is to improve the cycle time, order process efficiency and reduce the overall cost of manufacturing for both the mask maker and the customer. This specification is intended for use in North America as an emerging market. However, the applicability of this specification is not restricted or limited to this region alone. This standard was developed to address a North American need for a common set of requirements for specifying, manufacturing, and ordering large area masks.

The following areas are covered by this document: Registration and Accuracy, Critical Dimensions, Centrality, Pellicles, Edge Length and Thickness, Symbology, Data Formats, Auto Inspection Artifacts, and Product Labeling. This specification is being issued so that the industry may evaluate the concept covered before its adoption as a full standard. It is expected that initial application will occur mostly in North America, however, nothing in this standard limits its use to this market region.

Referenced SEMI Standards
SEMI D6 — Specification for Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates
SEMI P5 — Specification for Pellicles
SEMI P6 — Specification for Registration Marks for Photomasks
SEMI T8 — Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol

Revision History
SEMI D26-1000 (first published)

This guide was technically approved by the Global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 28, 2000. Initially available at www.semi.org August 2000; to be published October 2000.

This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility. This guide includes references to other SEMI standards. It also includes definitions and explanations specific to FPD equipment automation. The scope of this guide is limited to equipment communication features that interface with factory automation systems.

This guide does not reference physical or electrical interfaces, except to the extent necessary to implement the features described. For example, a serial data cable connector could be specified to have 9 pins or 25 pins. This guide may not be applicable to all types of FPD equipment. It only applies to those for which a direct data communication interface will be implemented between the equipment and the factory automation systems. This guide does not address all software standards that may be applicable, but addresses a subset that is necessary for effective integration and automation.

Referenced SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services
SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O

Revision History
SEMI D27-1000 (first published)

This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published November 2001.

This specification defines a common set of feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These standardized feature requirements are intended to facilitate the interfacing of AGV, RGV, and MGV equipment to the process tool. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment, using AGV, RGV, and MGV.

This specification defines mechanical features on or about the tool port, and in front of or on the tool face. Although these features are intended for specific functions of AGV, RGV, and MGV, the interface requirements are meant to avoid the promotion of any particular form of transport.

Referenced Standards:
None.

Revision History:
SEMI D28-1101 (Reapproved 0708)
SEMI D28-1101 (first published)

This standard was technically approved by the global Flat Panel Display – Color Filter & Optical Elements Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 15, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007. Originally published November 2001.

The purpose of this document is to standardize the method for measurement of heat resistance in color filters used for flat panel displays (FPD).

This method is to be used by suppliers and users of FPD color filters to measure quality in products as well as items under development.

This method is used in general FPD production to test the resistance of color filters to heat.

Referenced SEMI Standards
SEMI D19 — Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filter
SEMI D22 — Test Method for the Determination of Color, Transmittance of Flat Panel Display Color Filter Assemblies

Revision History
SEMI D29-1101 (Reapproved 0707)
SEMI D29-1101 (first published)

This standard was technically approved by the global Flat Panel Display – Color Filter & Optical Elements Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 15, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007. Originally published November 2001.

The purpose of this document is to standardize the method for measurement of light resistance in color filters used for flat panel displays (FPD).

This method is to be used by suppliers and users of FPD color filters to measure quality in products as well as items under development.

This method shall be used in general FPD production to test the resistance of color filters to light.

Referenced SEMI Standards
SEMI D19 — Test Method for Chemical Resistance of FPD Color Filter
SEMI D22 — Test Method for the Determination of Color, Transmittance of FPD Color Filter Assemblies

Revision History
SEMI D30-0707 (technical revision)
SEMI D30-1101 (first published)

This standard will define the index of measurement for mura in FPD image quality inspection. Conventionally, inspection of FPD image quality has been sensory, mainly conducted via the human eye, and among the items detected, there has been no common standard for mura and other associated defects. For this reason, when panel makers and their users who conduct business with a fixed quality level set a mura acceptance level, limit samples are used as necessary. Operational problems with limit samples include:
- Level of mura cannot be determined without viewing the sample. Due to this, it is not possible to express the level via written documentation or telephone.
- The sample settings are subjectively decided by the setter, and lack objectivity.
- It is difficult to setup and maintain a consistent sample level at multiple locations, etc.
— Above all, in a market complicated by multiple panel makers and multiple users, where presently there is no fixed standard for expressing mura level, we have to say that it is extremely difficult to ensure a fixed level for panel quality. In this standard, using ergonomics approach, we will investigate the human eye’s sensitivity regarding mura, and by expressing the relation between mura area and contrast, propose an index to express the level of mura.

This standard is applicable to FPD (Flat Panel Displays) excluding CRT and HMD (Head Mount Displays). The display sizes targeted are typically from Type 8 (8" (20.3 cm) diagonal) to Type 30 (30" (76.2 cm) diagonal).

Referenced SEMI Standards
None.

Revision History
SEMI D31-1102 (first published)

This specification was technically approved by the Global FPD Materials and Components Committee and is the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the Japanese Regional Standards Committee on January 10, 2003. Initially available at www.semi.org January 2003; to be published March 2003.

This specification provides the location, dimensions, and message size of the marking symbol that consists of a two-dimensional code symbol and related alpha numeric characters (capable of being read visually through the reader camera and display) and is located outside of the quality area of glass flat panel display (FPD) substrate.

The marking symbol in this specification allows the inclusion of identification information for each individual substrate together with the additional information previously provided by various orientation corner (OC) cut shapes.

Thus, this specification allows suppliers of glass substrates for FPDs to simplify substrate information management by marking such information in one location around the OC on the substrate, before shipping. In addition, use of this marking symbol will facilitate the future elimination of the numerous types of OC cut shapes presently in use.

The marking symbol covered by this specification is intended for use by suppliers and purchasers of glass substrates for FPDs.

This specification provides for a standardized OC location in support of future unification of the OC cut shape as well as location. When this is done, the provisional nature of the specification can be removed.

This specification covers the content, dimensions, and surface positioning of the marking symbol located outside of the quality area of glass substrates for FPD use.

This marking symbol is marked in a manner and location to avoid affecting the user patterning process. Although this specification does not specify the marking technique to be employed when complying with its requirements, it is assumed that the marking symbol will be obtained by laser marking individual dots.

Marking symbols are applicable across all stages of FPD processing, from virgin substrates to fully patterned substrates. The format and algorithm for the Data Matrix code is based on two-dimensional symbology specified in ISO/IEC 16022.

Referenced SEMI Standards
None.

Revision History
SEMI D32-0303 (first published)

The electro optical characteristics of backlight unit (BLU) have a great influence on the characteristics of LCD like uniformity, luminance and chromaticity etc. There are many measurement methods for BLU of electro optical characteristics. It is so different that the measurement method for BLU in each company (e.g.: the testing position, test condition, equipment concept etc.). Therefore, this standard will present the general measurement method.

This standard is applicable to BLU for Liquid Crystal Display (LCD) and the measurement includes only the optical area. The other areas (Electric characteristics, Reliability, and so forth) are dealt with by other SEMI standards.

Referenced SEMI Standards
None.

Revision History
SEMI D33-0703 (first published)

This standard establishes implementation guidelines for the measurement of visual appearance, thickness, and optical characteristics of FPD Polarizing Films.

These methods can be applied in manufacturing, quality control, and research and development. This document specifies measurement methods. Specifies measurement methods for visual appearance (dot defects, line defects, visual exclusion area), thickness, optical characteristics (single transmittance, parallel transmittance, cross transmittance, UV cut performance, polarization efficiency, hue a, b and hue a*, b* and haze) of polarizing films.

Referenced SEMI Standards
None.

Revision History
SEMI D34-0703 (first published)

This test method was technically approved by the Global Flat Panel Display Committee and is the direct responsibility of the Japanese Flat Panel Display Committee. Current edition approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be published November 2003.

E This standard was editorially modified in November 2004 to correct editorial errors. Changes were made to multiple sections, figures, and tables.

The purpose of this document is to standardize the method for measurement of electrical and optical characteristics of cold cathode fluorescent lamp (CCFL). This method is to be used by CCFL suppliers and users to evaluate quality of products as well as items under development. This method shall be used in general for CCFL to measure the initial characteristics of CCFL (single item) and its reliability after tests, and to carry out quality inspection for incoming and outgoing CCFLs.

Referenced SEMI Standards
None.

Revision History
SEMI D35-1103E (editorial revision)
SEMI D35-1103 (first published)

This standard was technically approved by the global Flat Panel Display - Color Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. It was available at www.semi.org in February 2006 and on CD-ROM in March 2006. Originally published November 2003.

NOTICE: This document was completely rewritten in 2006.

These terms and definitions describe various components and characteristics of backlight units used for light sources of liquid crystal displays. This standard will be helpful to unify terminologies used for backlight units, which will improve manufacturing efficiency by saving manufacturing cost and time.

This standard is applicable to backlight units. The standard includes the terminologies of components used in backlight units, inspection and measurement used in backlight unit industry as well as panel and instrument industry. The other areas are handled in other SEMI standard documents.

Referenced SEMI Standards
None.

Revision History
SEMI D36-0306 (technical revision)
SEMI D36-1103 (first published)

This guide defines the quality area of LCD masks. This guide applies to masks that are principally used in fabricating liquid crystal displays. The mask size specifies range from 202.8 Χ 202.8 mm to 700 Χ 800 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).

Referenced SEMI Standards
SEMI D6 — Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates

Revision History
SEMI D38-0304 (first published)

Markers on FPD polarizing films, originally used for indicating optical direction of the films, have expanded the variety of products, such as identification for both sides of films, and for equipment. This also complicated the variety of shapes and colors for markers.

This standard establishes specification for unifying markers used for indicating direction of FPD polarizing films. This specification may be applied to manufacturing process, quality control, and designing of Liquid Crystal Display (LCD) panel.

This document specifies markers on FPD polarizing films.

Referenced SEMI Standards
None.

Revision History
SEMI D39-0704 (first published)

This document provides the terms and definitions of a physical transformation when flat panel display (FPD) substrates are maintained statically. These terms and definitions are applicable to both front and back substrates used in FPD fabrication.

Referenced SEMI Standards
SEMI D9 — Terminology For FPD Substrates
SEMI D25 — Specification For Flat Panel Display Substrate Shipping Case

Revision History
SEMI D40-0704 (first published)

This standard was technically approved by the Global Flat Panel Display - Factory Committee and is the direct responsibility of Japanese Flat Panel Display Factory Automation Committee. Current edition approved by the Japan Regional Standards Committee on November 24, 2004. Initially available at www.semi.org January 2005; to be published March 2005.

This standard will define the application of the formula derived in SEMI D31 to various test conditions closed to visual inspection for MURA in FPD image quality inspection. SEMI D31 has derived a formula to detect defects and blemishes in FPD in comparison with human eyes and CCD based instruments. In general the difficulty of implementing instruments to replace human inspector lays on human factor variation with its origin and location.

This standard is applicable to FPDs. This standard mainly deals with both the measurement method of Semu and the revised definition of Semu. The target display size is typically from 8" (20.3cm) to 30" (76.2cm) diagonal.

Referenced SEMI Standards
SEMI D31 — Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection

Revision History
SEMI D41-0305 (first published)

This standard was technically approved by the global Flat Panel Display – Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008. Originally published March 2005.

This standard defines the specification for ultra large size substrate case used in LCD (Liquid Crystal Display) manufacturing process.

The specification defined by this standard is applicable to the case for containing substrate materials used in LCD mask manufacturing process. The objective substrate range for the mask size defined by this standard is 850 Χ 1,200 mm and more.

The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the substrate. This specification defines the handling volume for mask substrate inside the case.

Referenced Standards:
None.

Revision History:
SEMI D42-0308 (technical revision)
SEMI D42-0305 (first published)

This standard was technically approved by the global FPD Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005 and on CD-ROM in November 2005.

In FPD manufacturing, customers have requirements concerning vibration of handling cassettes caused by the handling equipment during transportation. However, measurement methods and measurement locations are unclear. This test method clarifies the measurement methods and measurement locations.

This standard will specify measurement method and measurement points, for vibration occurring at contact points between AMHS and cassettes used for handling.

This standard shall be applied to measure vibration at the contact points between AMHS and cassettes used for handling.

Depending on facilities conditions on the fab line, AMHS may cause vibration in buildings, equipment, etc., but this standard is not intended to apply to the influence of vibration on manufacturing equipment caused by handling equipment, nor the effect of vibration on building structure.

The measurement method and measurement points set forth in this standard do not evaluate measurement results, nor evaluate effect on manufacturing.

This standard measures the effect given to the cassette from AMHS, and is not intended to measure cassette vibration or measure the vibration of glass within the cassette.

This standard does not cover conveyor type cassette handling, such as roller conveyor, chain conveyor, belt conveyor, etc.

Referenced SEMI Standards
None.

Revision History
SEMI D43-1105 (first published)

This standard was technically approved by the global Flat Panel Display (FPD) - Factory Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006.

E This standard was editorially modified in February 2007 to correct an error. Changes were made to Ά 6.2.2.4.

This standard defines the datum line that specifies the position of the FPD manufacturing equipment, the position of the substrate, and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment.

This standard is used to clarify the positional relationship when a substrate is loaded to or unloaded from manufacturing equipment by AMHS.

For the purpose above, this standard shall define a datum line of the AMHS and the manufacturing equipment that clarifies the positional relationship between substrate and equipments.

Referenced SEMI Standards
SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates used to Manufacture Flat Panel Displays

Revision History
SEMI D44-0706E (editorial revision)
SEMI D44-0706 (first published)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006.

This standard establishes practices for measuring characteristics of resin Black Matrix (BM) with high resistance for FPD color filter.

These methods are applicable to manufacturing, quality control, and development operations.

These methods shall be used in general to measure the resistance of resin black matrix with high resistance for FPD color filter.

Referenced SEMI Standards
SEMI D13 — Terminology for FPD Color Filter Assemblies

Revision History
SEMI D45-0706 (first published)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006 and on CD-ROM in July 2006.

In this standard, definition and interpretation of each term provides material characteristics used for Flat Panel Display (FPD) manufacturing. This standard benefits unification of terminologies generally used for Polarizing Films of FPD manufacturing.

This standard is applicable for Polarizing Films of FPD manufacturing. It covers terminologies related to Polarizing Films of FPD manufacturing, used in the area of material, inspection, and measurement.

Referenced SEMI Standards
None.

Revision History
SEMI D46-0706 (first published)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007 and on CD-ROM in March 2007.

The purpose of this document is to standardize the method for measurement of electrical and optical characteristics of bent cold cathode fluorescent lamp (CCFL).

This method is to be used by CCFL suppliers and users to evaluate quality of products as well as items under development.

This method shall be used in general for CCFL to measure the initial characteristics of CCFL (single item) and its reliability after tests, and to carry out quality inspection for incoming and outgoing CCFLs.

Referenced SEMI Standards
SEMI D35 — Test Method for Measurement of Cold Cathode Fluorescent Lamp (CCFL) Characteristics

Revision History
SEMI D47-0307 (first published)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007 and on CD-ROM in November 2007.

This standard defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.

This standard is used to clarify the position of a 2D-ID reader, when a substrate is loaded to or unloaded from manufacturing equipment by AMHS.

For the purpose above, this standard shall define a datum line of the AMHS and the manufacturing equipment that clarifies the positional relationship between the reading position of 2D-ID, AMHS, and manufacturing equipment.

Referenced SEMI Standards
SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays
SEMI D32 — Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner Unification
SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool

Revision History
SEMI D48-1107 (technical revision)
SEMI D48-0307 (first published)

This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007.

This standard is intended to further specify the single substrate ID reader position by specifying more clearly the orientation of single substrate for loading/unloading indicated with a virtual datum line that is prescribed in SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool.

For this purpose, this standard specifies only the orientation of single substrate in loading/unloading into/from AMHS and equipment and does not specifies the orientation of single substrate inside the equipment.

Referenced SEMI Standards
SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays
SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool
SEMI D48 — Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing off/on Tool

Revision History
SEMI D49-0707 (first published)

This standard was technically approved by the global Flat Panel Display – Color Filter & Optical Elements Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007.

This specification defines the procedural guideline for measuring the surface hardness of a polarizing film and its materials for FPD. These procedures are applicable to manufacturing, quality control, and development work.

This specification clarifies the differences when evaluating a polarizing film and its materials, using ISO15184:1998 “Paint and Vanishes – Determination of Film Hardness by Pencil Test,” the specification defined for determining the hardness of coating films. It specifically clarifies the load in the test method and evaluation items in the evaluation method.

This specification defines the measurement method of surface hardness of a polarizing film and its materials for FPD applications.

Referenced SEMI Standards
None.

Revision History
SEMI D50-0707 (first published)

This standard was technically approved by the global Flat Panel Display – Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008 and on CD-ROM in March 2008.

Due to the migration to large substrate sizes in FPD production, the demand for single substrate transfer, with the extensive combined use of Automated Material Handling Systems (AMHS), robots and conveyors, is increasing. On the other hand, each FPD fab uses different handshake specifications for single substrate transfer, which creates issues such as increase in cost, as well as delay in delivery and testing. It is imperative to define a handshake method for transferring single substrates to the process equipment in order to solve these issues.

The purpose of this specification is to standardize the handshake methods for transferring single substrates, which are currently different at each FPD fab. It is expected that this will result in improved efficiency in the design, production and installation of equipment, as well as in cost reduction.

The scope of this standard is limited to the handshake associated with the transfer operation of single substrates between the single substrate transfer system and the process equipment. Examples are single substrate transfer between the process equipment and the single substrate transfer system, between the single substrate transfer system and the buffers, etc.

The handshake specification for transferring single substrates includes:
- Signal definition (refer to Ά 7.1)
- Single substrate transfer sequence definition (refer to Ά 7.2)
- Guideline for detecting timeout errors (refer to Ά 7.3 and Ά 7.4)

This standard only defines the handshake process and basic handshake signals with their meanings and handling method, for transferring single substrates from single substrate transfer systems to the process equipment.

The single substrate transfer handshake that is defined in this standard may also be applied to single substrate transfer between different pieces of process equipment.

Referenced Standards:
SEMI D44 — Specification for Reference Position of Single Substrate for Handling Off On Tool

Revision History:
SEMI D51-0308 (first published)

This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008.

SEMI D32 only specifies one Bare Glass ID position, however, it is necessary to assign multiple substrate IDs for efficient operation as the sizes become larger. Therefore, this standard specifies substrate ID positions for efficient operation based on SEMI D32.

This standard specifies the substrate ID positioning with 2D Code.

When the IDs are required to be individually distinguished, they are called Bare Glass or Resin ID, but when they are not required to be distinguished, they are generally called Substrate ID.

Referenced Standards:
SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays
SEMI D32 — Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner Unification
SEMI D48 — Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing off/on Tool

Revision History:
SEMI D52-0708 (first published)

This standard was technically approved by the global Flat Panel Display – Mask Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008.

This specification defines standard stand off, transmittance, and strength of pellicle films used for masks.

These dimensions apply to pellicle for masks that are principally used in fabricating liquid crystal displays. The mask size specifies range from 330 Χ 450 mm to 1220 Χ 1400 mm.

Referenced Standards:
SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates

Revision History:
SEMI D53-0708 (first published)