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SEMI F001 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
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Latest revision: 96
SEMI F004 - Specification for Pneumatically Actuated Cylinder Valves
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Latest revision: 1000
SEMI F005 - Guide for Gaseous Effluent Handling
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Latest revision: 1101
SEMI F006 - Guide for Secondary Containment of Hazardous Gas Piping Systems
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Latest revision: 92
SEMI F007 - Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials
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Latest revision: 92 (Reapproved 0299)
SEMI F008 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces
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Latest revision: 0998
SEMI F009 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition
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Latest revision: 0998
SEMI F010 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials
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Latest revision: 0698
SEMI F011 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
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Latest revision: 0998
SEMI F012 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
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Latest revision: 0998
SEMI F013 - Guide for Gas Source Control Equipment
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Latest revision: 1101
SEMI F014 - Guide for the Design of Gas Source Equipment Enclosures
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Latest revision: 93 (Reapproved 0699)
SEMI F015 - Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
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Latest revision: 0308
SEMI F018 - Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
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Latest revision: 95
SEMI F019 - Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
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Latest revision: 0304
SEMI F020 - Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
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Latest revision: 0706E
SEMI F021 - Classification of Airborne Molecular Contaminant Levels in Clean Environments
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Latest revision: 1102
SEMI F022 - Guide for Gas Distribution Systems
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Latest revision: 1102
SEMI F023 - Particle Specification for Grade 10/0.2 Flammable Specialty Gases
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Latest revision: 0697 (Reapproved 0303)
SEMI F024 - Particle Specification for Grade 10/0.2 Inert Specialty Gases
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Latest revision: 0697 (Reapproved 0303)
SEMI F025 - Particle Specification for Grade 10/0.2 Oxidant Specialty Gases
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Latest revision: 0697 (Reapproved 0303)
SEMI F026 - Particle Specification for Grade 10/0.2 Toxic Specialty Gases
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Latest revision: 0697 (Reapproved 0303)
SEMI F027 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
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Latest revision: 0997 (Reapproved 1103)
SEMI F028 - Test Method for Measuring Particle Generation from Process Panels
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Latest revision: 1103
SEMI F029 - Test Method for Purge Efficacy of Gas Source System Panels
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Latest revision: 0997 (Reapproved 1103)
SEMI F030 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
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Latest revision: 0298
SEMI F031 - Guide for Bulk Chemical Distribution Systems
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Latest revision: 0698
SEMI F032 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
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Latest revision: 0706
SEMI F033 - Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
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Latest revision: 0708
SEMI F034 - Guide for Liquid Chemical Pipe Labeling
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Latest revision: 0998
SEMI F035 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
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Latest revision: 0304
SEMI F036 - Guide for Dimensions and Connections of Gas Distribution Components
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Latest revision: 0299 (Reapproved 1104)
SEMI F037 - Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
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Latest revision: 0299 (Reapproved 1104)
SEMI F038 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters
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Latest revision: 0699 (Reapproved 1104)
SEMI F039 - Guideline for Chemical Blending Systems
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Latest revision: 0699
SEMI F040 - Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
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Latest revision: 0699E
SEMI F041 - Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
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Latest revision: 0699
SEMI F043 - Test Method for Determination of Particle Contribution by Point-of-Use Purifiers
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Latest revision: 0308
SEMI F044 - Specification for Machined Stainless Steel Weld Fittings
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Latest revision: 0307
SEMI F045 - Specification for Machined Stainless Steel Reducing Weld Fittings
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Latest revision: 0307