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SEMI M001 - Specifications for Polished Monocrystalline Silicon Wafers
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Latest revision: 0707
SEMI M003 - Specifications for Polished Monocrystalline Sapphire Substrates
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Latest revision: 0304 (Withdrawn 0707)
SEMI M004 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs
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Latest revision: 0707
SEMI M006 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
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Latest revision: 0707
SEMI M008 - Specification for Polished Monocrystalline Silicon Test Wafers
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Latest revision: 0307
SEMI M009 - Specifications for Polished Monocrystalline Gallium Arsenide Slices
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Latest revision: 0708
SEMI M010 - Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers
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Latest revision: 1296
SEMI M012 - Specification for Serial Alphanumeric Marking of the Front Surface of Wafers
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Latest revision: 0706
SEMI M013 - Specification for Alphanumeric Marking of Silicon Wafers
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Latest revision: 0706
SEMI M014 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals
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Latest revision: 89
SEMI M015 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
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Latest revision: 0298
SEMI M016 - Specification for Polycrystalline Silicon
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Latest revision: 1103
SEMI M017 - Guide for a Universal Wafer Grid
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Latest revision: 0704
SEMI M018 - Guide for Developing Specification Forms for Order Entry of Silicon Wafers
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Latest revision: 1107
SEMI M019 - Specification for Electrical Properties of Bulk Gallium Arsenide Single Crystal Substrates
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Latest revision: 91
SEMI M020 - Practice for Establishing a Wafer Coordinate System
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Latest revision: 1104
SEMI M021 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array
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Latest revision: 0304
SEMI M022 - Specification for Dielectrically Isolated (DI) Wafers
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Latest revision: 0303 (Withdrawn 0307)
SEMI M023 - Specification for Polished Monocrystalline Indium Phosphide Wafers
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Latest revision: 0703
SEMI M024 - Specification for Polished Monocrystalline Silicon Premium Wafers
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Latest revision: 0307
SEMI M026 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers
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Latest revision: 0304
SEMI M029 - Specification for 300 mm Shipping Box
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Latest revision: 1296 (Reapproved 1103)
SEMI M030 - Standard Test Method for Substitutional Atomic Carbon Concentration in GaAs by Fourier Transform Infrared Absorption Spectroscopy
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Latest revision: 0997
SEMI M031 - Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
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Latest revision: 0708
SEMI M032 - Guide to Statistical Specifications
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Latest revision: 0307
SEMI M033 - Test Method for the Determination of Residual Surface Contamination on Silicon Wafers by Means of Total Reflection X-Ray Fluorescence Spectroscopy (TXRF)
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Latest revision: 0998 (Withdrawn 1107)
SEMI M034 - Guide for Specifying SIMOX Wafers
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Latest revision: 0299
SEMI M035 - Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection
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Latest revision: 1107
SEMI M036 - Test Method for Measuring Etch Pit Density (EPD) in Low Dislocation Density Gallium Arsenide Wafers
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Latest revision: 0699
SEMI M037 - Test Method for Measuring Etch Pit Density (EPD) in Low Dislocation Density Indium Phosphide Wafers
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Latest revision: 0699
SEMI M038 - Specification for Polished Reclaimed Silicon Wafers
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Latest revision: 0307
SEMI M039 - Test Method for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility in Semi-Insulating GaAs Single Crystals
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Latest revision: 0999
SEMI M040 - Guide for Measurement of Surface Roughness of Planar Surfaces on Silicon Wafer
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Latest revision: 0200
SEMI M041 - Specifications for SOS Epitaxial Wafers
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Latest revision: 1103 (Withdrawn 0307)
SEMI M042 - Specification for Compound Semiconductor Epitaxial Wafers
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Latest revision: 1000
SEMI M043 - Guide for Reporting Wafer Nanotopography
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Latest revision: 0301
SEMI M044 - Guide to Conversion Factors for Interstitial Oxygen in Silicon
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Latest revision: 0305
SEMI M045 - Provisional Specification for 300 mm Wafer Shipping System
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Latest revision: 0703
SEMI M046 - Test Method for Measuring Carrier Concentrations in Epitaxial Layer Structures by ECV Profiling
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Latest revision: 1101E
SEMI M047 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications
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Latest revision: 0707